Klüber Tyreno Fluid MW-95V
Klüber Tyreno Fluid MW-95V
Klüber Tyreno Fluid MW-95V Is a oil for low and fine vacuum applications.
Benefits for your application
– Low final pressures, low backflow rate
– Suitable for oil-sealed single- and double stage pumps
Description
Klüber Tyreno Fluid MW-95V is a mineral oil.
Application
Working fluid for mechanical backing pumps extracting also aggressive gases, such as in plasma etching. The final pressure is approx. 10–3 mbar measured in doublestage mechanical backing pumps.
Application notes
Prior to filling, rinse pumps with fresh oil to remove solid residues. Avoid mixing with synthetic oils.